发明名称 |
GRANULAR THIN MAGNETIC FILM AND METHOD OF MANUFACTURING THE FILM, LAMINATED MAGNETIC FILM, MAGNETIC PART, AND ELECTRONIC DEVICE |
摘要 |
There are provided a magnetic thin film utilizing a granular film and having excellent high frequency characteristics and a method of manufacturing the same, and a multilayered magnetic film and magnetic components and electronic equipment utilizing the same. <??>A nonreactive sputtering is performed so that there is no oxidation of a magnetic metal, and a saturation magnetization is increased to increase a resonant frequency of permeability. Also, a multi-target simultaneous sputtering is combined with the nonreactive sputtering so that in a granular structure including magnetic grains and an insulating layer a size of the magnetic grains and a thickness of the insulating layer are optimized thereby ensuring a proper magnitude for a crystalline magnetic anisotropy within the grains and excellent soft magnetic properties. Further, the optimization of the thickness of the insulating layer has the effect of improving a resistivity, decreasing an eddy current and improving an exchange interaction between the magnetic grains. <IMAGE> |
申请公布号 |
EP1361586(A4) |
申请公布日期 |
2008.06.11 |
申请号 |
EP20020715778 |
申请日期 |
2002.01.17 |
申请人 |
TAIYO YUDEN CO., LTD. |
发明人 |
KOBAYASHI, KAZUYOSHI;IKEDA, KENJI;FUJIMOTO, MASAYUKI |
分类号 |
H01F10/00;H01F10/13;H01F10/32;H01F41/18;H01F41/30;H05K9/00;(IPC1-7):H01F10/20 |
主分类号 |
H01F10/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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