| 摘要 |
<p>In an angular velocity sensor (1), a center mass (3) and a pair of outer masses (4) are connected to each other via supporting beams (5) displaceable in the X-axial direction. When the angular velocity sensor (1) is operated, a vibration generator (8, 9) causes the masses (3, 4) to vibrate substantially at opposite phases to each other with respect to the X-axial direction. In this state, if an angular velocity on the Y-axis is added, the displacements of the masses (3, 4), caused when the masses (3, 4) are displaced in the Z-axial direction, are detected as the angular velocity. Moreover, fixing portions (6), formed on a substrate (2), support the sites of the supporting beams (5) corresponding to the nodes to suppress vibration of the masses (3, 4) from being transmitted to the substrate (2).</p> |
