SYMMETRIC INDUCTOR WITH BRANCHING-TYPED STRUCTURE AND THE MANUFACTURING METHOD

摘要

A symmetric inductor with a branching-typed structure and a method for manufacturing the same are provided to improve quality factor and a phase noise characteristic by forming the integrated inductor in a symmetric shape. A symmetric inductor includes a first metal wiring, a second metal wiring(120), and a via(130). The metal wiring is formed on a substrate(100) and has a spiral structure in which an input unit(111) and an output unit(112) are mutually symmetric with respect to a central axis. The second metal wiring is formed on the first metal wiring in a spiral shape arranged in parallel with the first metal wiring. The via electrically connects the first metal wiring and the second metal wiring. The symmetric inductor further includes an insulating layer formed between the first metal wiring and the second metal wiring.