| 摘要 |
A cleaning vessel and a silicon carbide sintered member used therefor are provided to utilize the silicon carbide sintered member as an ultrasonic resonant plate or an ultrasonic layer in a semiconductor device, electronic information device, or vacuum equipment. A cleaning vessel(1) comprises a body(2) and a silicon carbide sintered member(3). The body is made from polyvinyl chloride and has a cylindrical structure. The silicon carbide sintered member is formed at an inner peripheral edge of the body. An ultrasonic oscillator(5) is provided at an outer bottom surface of the body and the silicon carbide sintered member is formed on an inner bottom surface of the body corresponding to the ultrasonic oscillator. |
