SUBSTRATE TABLE AND APPARATUS FOR ASSEMBLING SUBSTRATES HAVING A THEREIN

摘要

A substrate table and a substrate bonding apparatus including the same are provided to increase the installation efficiency and working efficiency of a chuck by easily installing the chuck using a chuck installation unit. A base includes chucks(102) arranged in plural combinations to support a substrate. A chuck installation unit(120) is installed between the chucks to fix sides of the chucks so that positions of the chucks are maintained. The chuck installation unit has a body(122) installed on the base, a lateral insertion portion(124) inserted in a lateral groove(102a) formed on each side of the chucks, and a elastic member(126) installed on the body for resiliently supporting the lateral insertion portion.