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经营范围
发明名称
METHOD OF ETCHING SUBSTRATES
摘要
申请公布号
EP1502283(A4)
申请公布日期
2008.06.11
申请号
EP20030723844
申请日期
2003.03.31
申请人
LG ELECTRONICS INC.
发明人
YEOM, GEUN-YOUNG;YOO, MYUNG, CHEOL;URBANEK, WOLFRAM;SUNG, YOUN-JOON;JEONG, CHANG-HYUN;KIM, KYONG-NAM;KIM, DONG-WOO
分类号
H01L21/3065;C30B33/00;G03F9/00;H01B13/00;H01L21/00;H01L21/301;H01L21/302;H01L21/44;H01L21/46;H01L21/78;H01L33/00
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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