| 摘要 |
<p>A mask cassette apparatus is provided to prevent the apparatus from being falling over due to abnormal motion of a robot arm by installing a guide support portion of Teflon on a guide column. Mask support columns(230,231) are stood at four positions of a base(211) to support four corners of a mask(300). Lateral panels(251) are placed between sides of two mask support columns, and then are fastened to the mask support columns. Handling parts(253) are fastened to the panels, and guide parts(290,291) are placed on the base in the rear of two mask support columns opposite to a moving direction of a robot arm transferring the mask. Each of guide parts has an inclined surface for guiding the mask when the mask is mounted in an upward direction.</p> |
