发明名称 Improvements in or relating to the manufacture of semi-conductor devices
摘要 907,568. Semi-conductor devices. PHILIPS ELECTRICAL INDUSTRIES Ltd. Feb. 19, 1959 [Feb. 22, 1958; March 26, 1958], No. 5766/59. Class 37. Material is alloyed to the surface of a semi-conductor body by means of a jig which has a first area where the alloying material may be melted, and a duct so that when the jig is tilted the molten material flows through the duct on to the semi-conductor body. Fig. 1 shows a jig comprising a block 1 of graphite or oxidized ferrochromium with disposition areas for a germanium or silicon plate 4 and a contact material pellet 5, the two deposition areas being connected by a duct. After melting the contact material the jig is turned over so that the molten material flows on to the germanium to form an alloyed contact. Fig. 5 shows an arrangement with two material pellets, the jig being turned first such that pellet 28 alloys with one surface of germanium plate 26, and then to the reverse position so that pellet 29 alloys with the opposite surface. Fig. 14 shows an alternative arrangement in which a plug 86 is inserted above the germanium plate 83, and the supply duct has a horizontal as well as a vertical portion. In addition a further supply duct 90 and deposition area 92 is provided which contacts the edge of the germanium plate, for example for the provision of the base electrode of a transistor. Various other modifications are described whereby two or more contacts may be provided on one surface, or different contact materials may be deposited successively on one area. For example, bismuth and then an alloy of bismuth and aluminium may be used to provide a contact. Tilting of the jig may be effected by tilting of the whole furnace containing the jigs, or by assembling jigs in a rotatable holder in the furnace, or by carrying the jigs through a furnace on a conveyer belt which has portions with different slopes, or by means of lugs or magnetic devices. A " hump " furnace is described through which a protective gas such as a mixture of hydrogen and nitrogen may flow during the heating and movement of the conveyer belt; hydrochloric acid gas may be used as a flux. Rectifying or ohmic contacts may be provided, and multiple jigs may be used.
申请公布号 GB907568(A) 申请公布日期 1962.10.10
申请号 GB19590005766 申请日期 1959.02.19
申请人 PHILIPS ELECTRICAL INDUSTRIES LIMITED 发明人
分类号 H01L21/00;H01L21/24 主分类号 H01L21/00
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