Substrate processing method, substrate processing apparatus and substrate processing system

摘要

After subjected to a developing process, a rinsing process and a replacing process in this order in a developing unit 10 A, 10 B, a substrate W wet with an anti-drying solution is wet-transported to a supercritical drying unit 20 by a primary transport robot 30 . The supercritical drying unit 20 performs a high-pressure drying process (supercritical drying process) in a dedicated manner. Accordingly, by virtue of the presence of the anti-drying solution, the substrate W is effectively prevented from becoming air-dry during the transportation of the substrate W.