WAFER-PAIR HAVING DEPOSITED LAYER SEALED CHAMBERS

摘要

A wafer-pair having at least one recess in one wafer forms at least one chamber with the attaching of the other wafer which has at least one port which is plugged with a deposited layer on its external surface. The deposition of the layer may be performed in a very low pressure environment, thus assuring the same kind of environment in the seal ed chamber. The chamber may enclose at least one device such as a thermoelectric sensor, bolometer, emitter or other kind of device. The wafer-pair typically will have numerous chambers, and may be divided into chips.