EPITAXIAL OXIDE FILM, PIEZOELECTRIC FILM, PIEZOELECTRIC FILM ELEMENT, AND LIQUID DELIVERY HEAD AND LIQUID DELIVERY APPARATUS USING PIEZOELECTRIC ELEMENT

摘要

This invention provides a piezoelectric film, a piezoelectric film element, and a liquid delivery head and a liquid delivery apparatus using the piezoelectric film element. A piezoelectric film element suitable for a delivery pressure generating element in a liquid delivery head is prepared by using as a piezoelectric film an epitaxial oxide film formed of a perovskite composite oxide represented by general formula ABO3, the epitaxial oxide film comprising at least domain A and domain B having mutually deivated crystal orientation, the deviation of the crystal orientation of domain A and domain B is less than 2°.