发明名称 Systems and methods for testing microfeature devices
摘要 Systems and methods for testing microelectronic imagers and microfeature devices are disclosed herein. In one embodiment, a method includes providing a microfeature workpiece including a substrate having a front side, a backside, and a plurality of microelectronic dies. The individual dies include an integrated circuit and a plurality of contact pads at the backside of the substrate operatively coupled to the integrated circuit. The method includes contacting individual contact pads with corresponding pins of a probe card. The method further includes testing the dies. In another embodiment, the individual dies can further comprise an image sensor at the front side of the substrate and operatively coupled to the integrated circuit. The image sensors are illuminated while the dies are tested.
申请公布号 US7385412(B2) 申请公布日期 2008.06.10
申请号 US20060409060 申请日期 2006.04.24
申请人 MICRON TECHNOLOGY, INC. 发明人 AKRAM SALMAN;HIATT WILLIAM M.;WOOD ALAN G.;WATKINS CHARLES M.;KIRBY KYLE K.
分类号 G01R31/02;G01R31/26;G01R31/28;H01L27/00 主分类号 G01R31/02
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