发明名称 Multiple sensor feedback for controlling multiple ionizers
摘要 A feedback architecture for ionizers that allows simultaneous adjustment of positive and negative ionizer power supplies. Balance and swing data are fed back to the ionizer through an intermediate module, which permits an extra level of signal processing. Swing information is returned to both power supplies in negative feedback mode. If swing is too high, both power supplies lower output. Balance is fed back in both negative and positive feedback mode. This architecture is compatible with multiple sensors and multiple ionizers.
申请公布号 US7385798(B2) 申请公布日期 2008.06.10
申请号 US20070651120 申请日期 2007.01.08
申请人 MKS INSTRUMENTS 发明人 WARREN BRIAN;OLDYNSKI EDWARD;GEHLKE SCOTT
分类号 H02H1/00 主分类号 H02H1/00
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