| 摘要 |
A method and apparatus for measuring the physical properties of a micro region measures the two-dimensional distribution of stress/strain in real time at high resolution and sensitivity and with a high level of measuring position matching. A sample is scanned and irradiated with a finely focused electron beam ( 23, 26 ), and the displacement of position of a diffraction spot ( 32, 33 ) is measured by a two-dimensional position-sensitive electron detector ( 13 ). The displacement amount is outputted as a voltage value that is then converted into the magnitude of the stress/strain according to the principle of a nano diffraction method, and the magnitude is displayed in synchronism with a sample position signal.
|
