METHOD OF FABRICATING MULTI FUNCTION MICRO ELECTRO MECHANICAL SYSTEM SENSOR

摘要

A method of manufacturing a MEMS(Micro Electro Mechanical System) sensor is provided to mount sensors having different functions on one chip in batch by using MEMS technology. A first electrode(102) of a physical quantity detecting sensor is formed on a substrate(100), and then a first sacrificial layer(106) is formed on the entire surface of the substrate comprising the first electrode. An impurity doped layer is formed on the first sacrificial layer over the first electrode, and a second sacrificial layer(108) is formed on the entire surface of the substrate comprising the impurity doped layer. A floating structure having a second electrode(110) is formed on the second sacrificial layer, and then the second and first sacrificial layers are selectively etched to form an etching hole. The first and second sacrificial layers are selectively etched to form an air gap(121) between the first and second electrodes.