| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical measuring instrument, more specifically, a method for allowing the optical measuring instruments to match one another, by utilizing improvement of spectra. SOLUTION: A plurality of optical measuring instruments are made to match one another, by obtaining a first set of a measuring diffraction signal measured, using a first optical measuring instrument and a second set of a measuring diffraction signal measured using a second optical measuring instrument. A first spectrum shift correction value is formed, on the basis of the difference between the first set of the measuring diffraction signal and the second set of the measuring diffraction signal. The first noise weighting function for the first optical measuring instrument is formed, on the basis of the measuring diffraction signal measured using the first optical measuring instrument, and the first measuring diffraction signal measured that uses the first optical measuring instrument is obtained. A first regulated diffraction signal is formed, by regulating the first measuring diffraction signal, using the first spectrum shift correction value and the first noise weighting function. COPYRIGHT: (C)2008,JPO&INPIT |
