| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage device and a camera-shake correcting device which are capable of surely wiping dust, etc. adhering to especially the friction portions of the stage device and the camera-shake correcting device and to provide a method of driving the stage device. SOLUTION: In the stage device, a movable section 50 on which a CCD 45 is mounted and an X-direction driving coil CX and Y-direction driving coils CYA and CYB are formed is held between a base yoke plate 31 and a driving yoke plate 32 and smooth surfaces 40a and 41a formed on the front and rear surfaces of the movable section 50 are supported to freely linearly and rotatably move by a pressing pin 63 and a substrate supporting projection 65 which freely frictionally hold and press the smooth surfaces 40a and 41a. The stage device is provided with a vortex drive signal source 83 for outputting a vortex signal for moving the movable section 50 to describe a spiral locus diverging from the center of the movable range of the movable section 50 to the coils CX, CYA and CYB. COPYRIGHT: (C)2008,JPO&INPIT |
