| 摘要 |
PROBLEM TO BE SOLVED: To meet the request that, as a manufacturing method of a stamper, there is sought one which eliminates preparing an original of a microchip, unnecessitates the plating process and further which is simple, has fewer processes and gives a stamper that is easy to inspect and excellent in durability. SOLUTION: In order to solve the above problems a method is provided which makes a quartz stamper for injection molding by forming a metal thin film on a quartz substrate, coating a photoresist on it, exposing a reversal pattern of a micro flow channel having a desired shape to this photoresist and developing to form the reversal pattern of the micro flow channel on the quartz substrate, etching the exposed metal thin film, and then further etching the resist and the quartz substrate to obtain the stamper without removing the exposed metal thin film. COPYRIGHT: (C)2008,JPO&INPIT |
