发明名称 |
Low voltage microcavity plasma device and addressable arrays |
摘要 |
Microcavity plasma devices and arrays of microcavity plasma devices are provided that have a reduced excitation voltage. A trigger electrode disposed proximate to a microcavity reduce the excitation voltage required between first and second electrodes to ignite a plasma in the microcavity when gas(es) or vapor(s) (or combinations thereof) are contained within the microcavity. The invention also provides symmetrical microplasma devices and arrays of microcavity plasma devices for which current waveforms are the same for each half-cycle of the voltage driving waveform. Additionally, the invention also provides devices that have standoff portions and voids that can reduce cross talk. The devices are preferably also used with a trigger electrode.
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申请公布号 |
US2008129185(A1) |
申请公布日期 |
2008.06.05 |
申请号 |
US20070811892 |
申请日期 |
2007.06.12 |
申请人 |
THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS |
发明人 |
EDEN J.GARY;PARK SUNG-JIN;TCHERTCHIAN PAUL A.;SUNG SEUNG HOON |
分类号 |
H05H1/24 |
主分类号 |
H05H1/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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