| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a needle-like body which is suitable for mass production, has a taper angle with a smooth side, and can manufacture even in a shape with a sharp tip part of the needle-like body. <P>SOLUTION: The method includes a process for coating a transparent base material with negative photoresist and a process for performing exposure processing to the negative photoresist from the transparent base material side by using a mask having an opening part. The mask having the opening part has a micro-lens for collecting transparent light passing through the opening part to the negative photoresist. A size and a shape of the needle-like body can be controlled, by controlling a diameter and curvature of the micro-lens. <P>COPYRIGHT: (C)2008,JPO&INPIT |
