| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibrator manufacturing method that enables to directly join an elastic body with an electromechanical energy conversion element without via an adhesive layer, and which enables making the thickness of the electromechanical energy conversion element very small. <P>SOLUTION: An AD method is used for manufacturing a piezoelectric element. A piezoelectric material made as a powder, having a particle size of 100 μm or smaller, is made into an aerosol with an agitation tank filled with an inert gas (an He gas) so as to spray it at high speed to a part, on which a film is desired to be formed, in a metal elastic body. Here, a stage mounted with the metal elastic body is moved, with respect to a nozzle for spraying the piezoelectric material powder. A nanoparticle powder 104 pulverized to a fine power with a particle size of about 10 μm is deposited on the surface of the metal elastic body 102. The spray temperature of the piezoelectric material is raised gradually from 500°C to 700°C which is the calcination temperature of the piezoelectric material so as to execute calcination for longer than one hour. A thin-film piezoelectric layer 101 comprising a piezoelectric element is formed directly on the surface of the metal elastic body 102. <P>COPYRIGHT: (C)2008,JPO&INPIT |
