| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To reduce manufacturing costs, and to miniaturize a sensor. <P>SOLUTION: A plate member 101 having flexible portions, plate members 102 to 104 having openings that correspond to the flexible portions of the plate member 101, a plate member 201 having flexible portions, and plate members 202 to 204 having openings that correspond to the flexible portions of the plate member 201 are formed through etching. The plate members 101 to 104, and 201 to 204 are bonded by a diffusion bonding technique to produce first and second flanges 100, 200. A coupler is machined by cutting. The first and second flanges 100, 200 and the coupler are bonded by the diffusion bonding technique, to produce a strain generating unit 5. By attaching a plurality of strain gauges to the lower face of the strain generating unit 5, a stain gauge type sensor 1 is completed. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
