METHOD FOR REPAIR HALF TONE MASK PORTION AND THIN FILM TRANSISTOR DEVICE USING THEREOF

摘要

A method for repairing a half-tone mask and a method for manufacturing a thin film transistor device thereby are provided to uniformly form light transmittance by forming a repair part with a lattice pattern. A gate pattern including a gate line and a gate electrode(20) are formed on a transparent substrate(10). A gate insulating layer(30) is formed on the substrate having the gate pattern. An active layer(40), a source electrode(60), and a drain electrode(70) are formed on the gate insulating layer. A data line(50) is connected to the source electrode. An ohmic contact layer is formed between the active layer, the source electrode, and the drain electrode. A data pattern is formed by performing a mask process using a single slit mask. A protective layer(80) having a contact hole(90) is formed by performing a mask process. A pixel electrode(135) is formed by performing a mask process.