| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an atmospheric pressure plasma jet apparatus capable of lengthening the plasma plume that can efficiently reform the surface irrespective of the surface shape of the material. <P>SOLUTION: An atmospheric pressure plasma jet generating means 3 generates an atmospheric pressure plasma jet 25, by using a raw material gas composed of a single kind of gas, or two or more kinds of gases that hardly react with one another in a plasma. The upper part 31 and the lower part 33 of a processing chamber as inclusion preventing means prevents an ambient gas from being included into the atmospheric pressure plasma get 25. <P>COPYRIGHT: (C)2008,JPO&INPIT |
