| 摘要 |
PROBLEM TO BE SOLVED: To suppress a roller of substrate carrying equipment from deteriorating due to the irradiation of the soft X-ray emitted from a soft X-ray irradiating apparatus disposed just near the roller. SOLUTION: In the substrate carrying equipment, each of shield plates SHP is interposed between each of soft X-ray irradiating apparatuses SXU for removing the charge of a glass substrate SUB and each roller of a plurality of rollers RLR disposed in the vicinity of each of these soft X-ray irradiating apparatuses as to suppress the soft X-ray having a large intensity from irradiating directly each roller. COPYRIGHT: (C)2008,JPO&INPIT
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