| 摘要 |
PROBLEM TO BE SOLVED: To inexpensively and efficiently manufacture a stamper intermingled with a micro-order fine structure and a nano-order fine structure. SOLUTION: The manufacturing method has a photolithography process (steps s1 to s5) using a mask 1 intermingled with a mask pattern 1a for micro-order and a mask pattern 1b for nano-order, a dry etching processing process (step s6) of a substrate 10 where patterns (3a, 3b) are formed by the photolithography process, a process (steps s7 to s9) where a reversal layer 6 is provided on a surface of the substrate where a micro/nano-fine unevenness is formed by the dry etching, and a process (steps s10 to s12) where a stamper 7 is obtained by taking out the reversal layer from the substrate. The stamper 7 where the micro/nano-fine unevenness 8a, 8b are formed on the surface can be collectively made so as to have effect for shortening the manufacturing time and cost reduction. COPYRIGHT: (C)2008,JPO&INPIT
|
