发明名称 REACTION APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a reaction apparatus in which water (a first substance) is reacted with COF<SB>2</SB>(a second substance) without condensing steam to produce gaseous HF (a third substance). SOLUTION: An inner pipe 33 having many micropores 33a is arranged in an outer pipe 32 of the reaction apparatus 30. An introduction part 12 of a first gas containing steam is connected to an internal passage 33b of the inner pipe 33. The upstream part of the internal passage 33b is kept at the steam-condensable temperature. An introduction part 23 of a second gas containing COF<SB>2</SB>is connected to an external passage 30a between the outer pipe 32 and the inner pipe 33. The second gas permeates through micropores 33a, enters the internal passage 33b and reacts with water to produce a condensate dr consisting of an HF aqueous solution. The condensate dr is prevented from being stuck to an inner wall of the inner pipe 33 by means of a current of the permeated gas. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008126179(A) 申请公布日期 2008.06.05
申请号 JP20060316179 申请日期 2006.11.22
申请人 SEKISUI CHEM CO LTD 发明人 ISHII TETSUYA;MIYAMOTO EIJI
分类号 B01J19/24;H01L21/302 主分类号 B01J19/24
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