发明名称 METHOD OF MANUFACTURING A THIN FILM TRANSISTOR ARRAY PANEL
摘要 A method for manufacturing a flexible display, includes forming a gate line including a plurality of gate electrodes with a first interval on a substrate having a coefficient of thermal expansion, sequentially depositing both a gate insulating layer covering the gate line and a semiconductor layer, etching the semiconductor layer by using a mask having a plurality of semiconductor patterns with a second interval different from the first interval to form a semiconductor, forming both a data line including a source electrode and a drain electrode on the semiconductor and the gate insulating layer, and forming a pixel electrode coupled with the drain electrode.
申请公布号 US2008131985(A1) 申请公布日期 2008.06.05
申请号 US20080969386 申请日期 2008.01.04
申请人 SAMSUNG ELECTRONICS CO., LTD., 发明人 CHOI TAE-YOUNG
分类号 H01L21/70 主分类号 H01L21/70
代理机构 代理人
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