IMMERSION EXPOSURE COAT FILM FORMING APPARATUS AND IMMERSION EXPOSURE COAT FILM FORMING METHOD

摘要

An immersion exposure coat film forming apparatus is provided for forming a coat film composed of a resist film or a coat film composed of a resist film and other film on a substrate to be exposed by an immersion exposure apparatus through a liquid. The immersion exposure coat film forming apparatus is provided with one or a plurality of coating units for coating the substrate with the resist film or the resist film and other film; one or a plurality of thermal treatment units for performing thermal treatment required for coat film formation on the substrate; an inspection unit for inspecting the status of the coating film at the edge section of the substrate prior to immersion exposure; and a control section which judges whether the coat film status at the edge section of the substrate is within the allowable range or not, based on the inspection results obtained from the inspection unit, and permits the substrate to be carried into the exposure apparatus when it is within the allowable range.