| 摘要 |
PROBLEM TO BE SOLVED: To aim at shortening of conveying time of a sample and reduction of a foot space, for a vacuum device for treating a sample in a treatment chamber in a vacuum state. SOLUTION: The vacuum device 1 is made provided with a top chamber 10 as well as a bottom chamber 20 connected with each other which can be individually evacuated, and is further provided with a gate valve 40 for opening and closing between them, a sample stand 31 for loading a sample S on, and a lifting mechanism 32 for conveying the sample S from one of the chambers 10, 20 to the other by moving up and down the sample stand 31. COPYRIGHT: (C)2008,JPO&INPIT
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