发明名称 |
ELECTRONIC COMPONENT, AND MANUFACTURING METHOD THEREOF |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a reliable electronic component in a multilayered structure composed of a semiconductor substrate, and to provide a manufacturing method of the electronic component. <P>SOLUTION: The method of manufacturing an electronic component includes: a first process for forming a plurality of wiring boards in a structure where a conductive material is embedded into through holes penetrating through the semiconductor substrate; a second process for installing conductive projections on the conductive material of any of the plurality of wiring boards; and a third process for bonding the plurality of wiring boards and electrically connecting each conductive material of respective wiring boards by the projections. <P>COPYRIGHT: (C)2008,JPO&INPIT |
申请公布号 |
JP2008130934(A) |
申请公布日期 |
2008.06.05 |
申请号 |
JP20060316202 |
申请日期 |
2006.11.22 |
申请人 |
SHINKO ELECTRIC IND CO LTD |
发明人 |
MURAYAMA HIROSHI;TAGUCHI YUICHI;SHIRAISHI AKINORI;HARUHARA MASAHIRO;AZUMA MITSUTOSHI |
分类号 |
H01L23/12;H01L25/065;H01L25/07;H01L25/18;H05K1/14 |
主分类号 |
H01L23/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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