发明名称 ELECTRONIC COMPONENT, AND MANUFACTURING METHOD THEREOF
摘要 <P>PROBLEM TO BE SOLVED: To provide a reliable electronic component in a multilayered structure composed of a semiconductor substrate, and to provide a manufacturing method of the electronic component. <P>SOLUTION: The method of manufacturing an electronic component includes: a first process for forming a plurality of wiring boards in a structure where a conductive material is embedded into through holes penetrating through the semiconductor substrate; a second process for installing conductive projections on the conductive material of any of the plurality of wiring boards; and a third process for bonding the plurality of wiring boards and electrically connecting each conductive material of respective wiring boards by the projections. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008130934(A) 申请公布日期 2008.06.05
申请号 JP20060316202 申请日期 2006.11.22
申请人 SHINKO ELECTRIC IND CO LTD 发明人 MURAYAMA HIROSHI;TAGUCHI YUICHI;SHIRAISHI AKINORI;HARUHARA MASAHIRO;AZUMA MITSUTOSHI
分类号 H01L23/12;H01L25/065;H01L25/07;H01L25/18;H05K1/14 主分类号 H01L23/12
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