| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film pulse-driven gas sensor achieving stability against a change with time by maintaining the constant adsorption amount of oxygen in a gas sensing part, enabling the suppression of a change with time of the sensor resistance value of the gas sensing part. SOLUTION: The thin film gas sensor 1 is mounted with a gas sensing layer 52 having an alternately laminated structure of a SnO<SB>2</SB>layer 521 and an oxygen storage layer 522 composed of an oxygen supply material (ceria-zirconia solid solution (CeZrO<SB>4</SB>) or ceria (CeO<SB>2</SB>)), so that oxygen is distributed over the whole area of the gas sensing layer 52. COPYRIGHT: (C)2008,JPO&INPIT |
