| 摘要 |
PROBLEM TO BE SOLVED: To provide a differential pressure sensor usable favorably even in combustion gas or the like, and allowing precise measurement by simple constitution. SOLUTION: This differential pressure sensor outputs, as a detection result, an electrification quantity in a balance position between an external force for displacing a movable member 5 to a position detecting part 4 side in response to a differential pressure generated between pressure chambers 1a, 1b, and an electromagnetic force for returning the movable member 5 generated by an electromagnetic coil 8 with the electrification quantity in response to electric resistance of a position detecting part 4 varied by a contact degree with the movable member 5. COPYRIGHT: (C)2008,JPO&INPIT
|
