MOVABLE PHASE STEP MICRO MIRROR HAVING A MULTILAYER SUBSTRATE AND A METHOD FOR ITS MANUFACTURE

摘要

The invention relates to micro-optical elements having a substrate, to a method for manufacturing these elements and their use. The substrates have at least one vertical step at an optically effective surface. It is the object of the invention to provide micro-optical elements which have vertical steps at optically effective surfaces, observe a homogeneous reflectivity at both sides of the vertical step(s) and maintain a high planarity permanently and independently of the temperature. With micro-optical elements in accordance with the invention, vertical steps are formed in each case with an intermediate layer which is confined between at least two layers of a substrate.