发明名称 |
REGIONAL PATTERN DENSITY DETERMINATION METHOD AND SYSTEM |
摘要 |
A method and system of determining a localized measure of regional pattern density in a fabrication process of a chip are disclosed. In one embodiment, the method includes determining pattern density values for each cell of a plurality of cells of interest; averaging the pattern density values for each cell within a first selected region about a target cell to determine the localized measure of regional pattern density for the target cell; storing the localized measure of regional pattern density for the target cell; and repeating the averaging and the storing for each of the plurality of cells. The simplification of data allows for a localized measure of regional pattern density determination in much less time than conventional techniques.
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申请公布号 |
US2008134111(A1) |
申请公布日期 |
2008.06.05 |
申请号 |
US20060566884 |
申请日期 |
2006.12.05 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ABBOTT GEOFFREY K.;LANDIS HOWARD S.;PARKER DAVID P. |
分类号 |
G06F17/50 |
主分类号 |
G06F17/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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