| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration detector capable of outputting a digital vibration detection signal by simple constitution. SOLUTION: This vibration detector is constituted to include aΔΣmodulator using a phase difference change between a reference light and a reflected light caused by an optical path change in an interferometer as a feedback parameter to the interferometer (piezoelectric oscillator driver 181). Vibration of a vibration film 11 is digital-detected as a binarized sound signal Sout by simple constitution. The detector is constituted simply as the whole, since not a displacement of the vibration film 11 itself but the phase difference change between the reference light and the reflected light is made to serve as the feedback parameter. COPYRIGHT: (C)2008,JPO&INPIT
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