| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a separable element for suppressing the occurrence of breakage or the generation of cracks. SOLUTION: The manufacturing method is composed of an element forming step which has a frame shaped fixing part 32, a cross shaped arm 34 connected to the fixing part 32, and four weights 36 connected to the central part of an arm 34, and forms a detection element 30 locked through a locking part 54, a modified part forming step which forms a modification part 56 at the locking part 54 by modifying the material of the locking part 54 to a more brittle material than the material of the detection element 30 by irradiating a laser on the locking part 54, and a constitution which separates the modification part 56 from the detection element 30 by applying stress to the modification part 56 to release the locking of the detection element 30. COPYRIGHT: (C)2008,JPO&INPIT
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