Multi-Beam Modulator For a Particle Beam and Use of the Multi-Beam Modulator for the Maskless Structuring of a Substrate

摘要

The invention discloses a multibeam modulator which generates a plurality of individual beams from a particle beam. The particle beam illuminates the multibeam modulator at least partially over its surface. The multibeam modulator comprises a plurality of aperture groups composed of aperture row groups. The totality of all aperture rows defines a matrix of mxn cells, where m cells form a row, and k openings are formed in each row. The density of openings within a row is inhomogeneously distributed.