| 摘要 |
An evaporation source device comprises a fusion section 24 , a retainer section 21 , an evaporator section 22 , and an ejector section 23 . When cylindrical heaters 241 and 211 are electrically energized, a linear evaporation material 31 is fused. A molten evaporation material 32 runs from a heating container 242 and retains in a heating container 212 . The evaporation material 32 in the heating container 212 runs down from a descending opening 216 along a descending column 224 . The evaporation material 32 evaporates by the radiation heat from the cylindrical heater 221 on the falling process. The vapor of the evaporation material 32 is ejected from the nozzle 232 onto the substrate 61 . Each of the cylindrical heaters 241, 211, 221 , and 231 , which is made of graphite, generates heat when a voltage is applied between electrodes 213 and 214 , between electrodes 214 and 222 , or between electrodes 232 and 233. |
