| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for measuring the insulating resistance of an electrostatic countermeasure part, which can simultaneously carry out a contact check of a probe and a measurement of the insulating resistance of the electrostatic countermeasure part, by using a simple facility configuration. SOLUTION: The method for measuring the insulating resistance of the electrostatic countermeasure part comprises: bringing a first probe 26 and a second probe 27 to contact with a first electrode 22 formed on the upper surface of the electrostatic countermeasure part 25; bringing a third probe 28 and a fourth probe 29 to contact with a second electrode 23 formed on the upper surface of the electrostatic countermeasure part 25; and measuring the insulating resistance of the electrostatic countermeasure part 25 by using an external resistor 31 which is connected to the electrostatic countermeasure part 25 in parallel and has a resistance value being 1/5 or less of insulating resistance values of the second and/or fourth probes 27, 29 measured in their contact miss states. COPYRIGHT: (C)2008,JPO&INPIT
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