| 摘要 |
PROBLEM TO BE SOLVED: To provide a printing mask washing device which enables high-speed response and fine-tuned liquid supply and more resource-saving mask washing. SOLUTION: The print mask washing device includes in its washing liquid circulation route L, a washing liquid supply part 31, a washing liquid tank 32, a washing liquid circulation pump 33, and flow channel shut-off valve 34. A washing liquid supply nozzle 37 which abuts clean paper 23 is formed in the washing liquid supply part 31, and a valve seat 42 as a back pressure valve mechanism 41 is mounted in a third space 40 between a first space 38 and a second space 39, and a washing liquid supply valve 44 pressed constantly by a spring member 43 onto the valve seat 42 on the side of the second space 39. An orifice 42h and a central hole 44h are respectively formed on the valve seat 42 and the washing liquid supply valve 44. COPYRIGHT: (C)2008,JPO&INPIT
|
