发明名称 |
AUTOMATIC VENTING OF REFILLABLE BULK LIQUID CANISTERS |
摘要 |
Methods, systems and apparatus for automatically maintaining a pressure differential for the continuous delivery of a liquid to semiconductor manufacturing equipment. A refillable bulk liquid delivery system includes a plurality of canisters residing along a liquid flow path, whereby an over pressure is detected within at least one of the canisters. The over pressure may be detected using an automatic venting circuit or a programmable logic controller programmed for detecting such over pressures. The over pressure is then exhausted by removing excess pressure from the canister through a venting valve to maintain a Delta pressure across the canisters for continuously delivering the liquid along the liquid flow path.
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申请公布号 |
US2008128049(A1) |
申请公布日期 |
2008.06.05 |
申请号 |
US20060566845 |
申请日期 |
2006.12.05 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
EASTON MARK C. |
分类号 |
B65B1/30;B65B31/00;B65B31/02;B65B31/04 |
主分类号 |
B65B1/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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