DEPOSITING ORGANIC MATERIAL ONTO AN OLED SUBSTRATE

摘要

A method of depositing organic material onto an OLED substrate (40), comprising: providing a manifold (10) for receiving vaporized organic material, the manifold including an aperture plate having openings, the aperture plate openings being selected to provide beams of vaporized organic material (50) directed to the substrate (40), such beams (5) having off-axis components (60); and providing a mask (80) spaced between the OLED substrate (40) and the manifold (10), the mask (80) having openings that respectively correspond to the aperture plate openings, the mask openings being selected to skim off at least a portion of the off-axis components (60) of the beams (50).