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发明名称
Verfahren zum Herstellen einer Polieraufschlämmung zur Verwendung in einem Präzisionspolierverfahren
摘要
申请公布号
DE602005002417(T2)
申请公布日期
2008.06.05
申请号
DE20056002417T
申请日期
2005.07.27
申请人
NEC ELECTRONICS CORP.;TOKYO MAGNETIC PRINTING CO. LTD.
发明人
KUNUGI, TAKAHARU;KAKU, TOMOHIRO;SASAKURA, TAKANORI
分类号
C09G1/02;B24B37/00;B24B57/02;H01L21/304
主分类号
C09G1/02
代理机构
代理人
主权项
地址
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