WINDING VACUUM FILM FORMING PROCESS AND APPARATUS

摘要

[PROBLEMS] To carry out a high-quality film forming processing through effective maintenance of the cleaning function of a can roller by a cleaning unit. [MEANS FOR SOLVING PROBLEMS] Prior to formation to base film (12), cleaning unit (30) is brought into contact with can roller (14) for cooling, and the can roller (14) is cleaned while rotating the same in noncooled condition. Accordingly, there can be realized prevention of supercooling of the cleaning unit (30), inhibition of detachment of removed dust and efficient execution of dust removal processing of the can roller (14) by the cleaning unit (30). Further, after completion of the cleaning, by cancellation of the state of contact between the cleaning unit (30) and the can roller (14), there can be attained prevention of cooling of the cleaning unit (30) by the cooling operation for the can roller (14) at film formation and retention of dust removed from the circumferential surface of the can roller (14) without being detached.