发明名称 |
PLASMA SOURCE, HIGH FREQUENCY ION SOURCE USING IT, NEGATIVE ION SOURCE, ION BEAM PROCESSOR, NEUTRAL PARTICLE BEAM INCIDENT DEVICE FOR NUCLEAR FUSION |
摘要 |
<P>PROBLEM TO BE SOLVED: To reduce plasma loss on the inner surface of a discharge tube. <P>SOLUTION: The discharge tube 5 constituted by insulator and a coil 3 arranged around the discharge tube 5 are provided. By applying high frequency to the coil 3, plasma is generated in the discharge tube 5. A Faraday shield 4 as a conductor is installed between the discharge tube 5 and coil 3, and has a plurality of slits 4S. A plurality of permanent magnets 6 are installed between the plurality of slits and outside the Faraday shield 4, and generate a multipole field B in the discharge tube 5. <P>COPYRIGHT: (C)2008,JPO&INPIT |
申请公布号 |
JP2008128887(A) |
申请公布日期 |
2008.06.05 |
申请号 |
JP20060315619 |
申请日期 |
2006.11.22 |
申请人 |
AE KIKI ENGINEERING CO LTD |
发明人 |
TANAKA MASANOBU;TOKIKUCHI KATSUMI;OKAWA HIROO;ONUKI HISAO |
分类号 |
G21B1/11;H01J27/02;H01J27/16;H01J37/08;H01J37/30;H05H1/24;H05H1/46;H05H3/00 |
主分类号 |
G21B1/11 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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