发明名称 PLASMA SOURCE, HIGH FREQUENCY ION SOURCE USING IT, NEGATIVE ION SOURCE, ION BEAM PROCESSOR, NEUTRAL PARTICLE BEAM INCIDENT DEVICE FOR NUCLEAR FUSION
摘要 <P>PROBLEM TO BE SOLVED: To reduce plasma loss on the inner surface of a discharge tube. <P>SOLUTION: The discharge tube 5 constituted by insulator and a coil 3 arranged around the discharge tube 5 are provided. By applying high frequency to the coil 3, plasma is generated in the discharge tube 5. A Faraday shield 4 as a conductor is installed between the discharge tube 5 and coil 3, and has a plurality of slits 4S. A plurality of permanent magnets 6 are installed between the plurality of slits and outside the Faraday shield 4, and generate a multipole field B in the discharge tube 5. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008128887(A) 申请公布日期 2008.06.05
申请号 JP20060315619 申请日期 2006.11.22
申请人 AE KIKI ENGINEERING CO LTD 发明人 TANAKA MASANOBU;TOKIKUCHI KATSUMI;OKAWA HIROO;ONUKI HISAO
分类号 G21B1/11;H01J27/02;H01J27/16;H01J37/08;H01J37/30;H05H1/24;H05H1/46;H05H3/00 主分类号 G21B1/11
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