| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus which can stop the radiation of a laser beam from a laser beam radiating means by intercepting a gate signal when a control program becomes abnormal in such a state that the gate signal for radiating the laser beam is output from a control means to a laser beam radiating means. <P>SOLUTION: The laser beam machining apparatus comprises a chucking table for holding a workpiece, a laser beam radiating means for irradiating the workpiece held by the chucking table with the laser beam, a machining feed means for relatively feeding the chucking table and the laser beam radiating means, and the control means for controlling the laser beam radiating means and the machining feed means according to the control program. The laser beam machining apparatus further comprises a safety means for intercepting the gate signal output from the control means to the laser beam radiating means when the abnormality has occurred in executing the control program in the control means. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
