发明名称 |
MOLD, MANUFACTURING METHOD THEREFOR AND MAGNETIC RECORDING MEDIUM |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a mold which can inexpensively provide a magnetic recording medium capable of obtaining a signal having higher signal intensity and a high S/N by a nanoimprint, a manufacturing method therefor and a magnetic recording medium made by using the mold. <P>SOLUTION: The manufacturing method for the mold used for the nanoimprint has at least a transfer process which transfers an uneven pattern on a resist layer by peeling a master mold having an uneven pattern after press-bonding the master mold to a resist layer formed on the surface of a substrate, and an uneven pattern forming process which forms the uneven pattern on the substrate by exposing an under substrate in a recessed part of the resist where the uneven pattern is formed by the transfer process and etching the exposed substrate. The manufacturing method for the mold is characterized in that the substrate is side etched during the substrate etching in the uneven pattern forming process. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
申请公布号 |
JP2008126450(A) |
申请公布日期 |
2008.06.05 |
申请号 |
JP20060312058 |
申请日期 |
2006.11.17 |
申请人 |
FUJI ELECTRIC DEVICE TECHNOLOGY CO LTD |
发明人 |
UCHIDA SHINJI |
分类号 |
B29C33/38;B29L17/00;B81C99/00;G11B5/65;G11B5/84;H01L21/027 |
主分类号 |
B29C33/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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