SURFACE REFORMING METHOD AND PATTERN FORMATION METHOD

摘要

PROBLEM TO BE SOLVED: To prepare a pattern on a target object using an inkjet printing method, the target object having a nonflat surface. SOLUTION: The surface reforming method includes a step A of forming a BCB layer on a surface of a target object, and a step B of exposing the top surface of the BCB to a CF4plasma. COPYRIGHT: (C)2008,JPO&INPIT