| 摘要 |
A method of calibrating a measurement an inspection system used in the LCD industry is presented. An assembly is created including two substrates coupled by a transducer. Two fixtures also adhere to the substrates and are connected to an interferometer. An inscription is created by marking at least one of the substrates using a reference point on a support table of the measurement and inspection system as a reference. The transducer is then operated to simulate an LCD glass process such as a thermal process or a glass cutting process. Operating the transducer also generates signals that are measured by the interferometer and represent a first distortion measurement. The inscription is then compared to reference mark to determine a second distortion measurement. A comparison of the first distortion measurement and the second distortion measurement are then used to calibrate the measurement and inspection device.
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